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Hardware Auto Focus

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At the 2013 Control trade fair, Carl Zeiss presented its new Hardware Auto Focus and cleanroom kit for the Axio Imager Vario microscope system.

The company says the Hardware Auto Focus is ideal for surface inspections on reflective, low-contrast samples. In transmitted and reflected light (brightfield, darkfield, polarisation contrast and oblique illumination), the focus system ensures high precision down to 0.3 of the depth of field of the objective lens.

The sensor registers changes to the focus position and automatically and quickly compensates any deviations via direct access to the Z drive of the microscope. As a result, even large samples such as monitors and solar panels in XY direction remain in focus.

The Hardware Auto Focus works ideally with Zeiss AxioVision software and is fully integrated in modules such as MosaiX for automated overview image capture.

Axio Imager Vario is certified for cleanroom use in accordance with DIN EN ISO 14644-1 and, with the cleanroom kit, fulfils the requirements of ISO 5, the most commonly used cleanroom class. This corresponds to the original FED STD 209E (1992) standard of class 100.

Extensive accessories such as the 7x turret with particle protection and sneeze guard ensure that samples such as wafers and photomasks are clean at all times.

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