Normally associated with blurry images over large distances, infrared imaging has now been used to provide detailed information about mechanical devices smaller than a grain of sand.
The Silver 600M high-resolution thermal camera from Cedip is now being used to provide key information about the thermal behaviour of tiny MEMS (micro electromechanical systems) devices, which themselves are frequently used in deformable mirrors to provide more focussed images.
The camera, when used with high-power microscopic lenses, provided a spatial resolution of just 3.5μm, which was enough to provide a detailed view of the structures.
