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HS100 3D non-contact profilometers

Nanovea, a US provider of Automated Optical Inspection (AOI) systems, supplies its HS100 3D non-contact profilometers, which use a white light axial chromatism technique to generate the surface profile. The system provides a wide range of automated surface measurement options, including profile, dimension, roughness, shape and form, flatness and planarity, volume area, step-height depth, and thickness. The inspection system is also able to measure nearly any material surface with zero influence from sample reflectivity or absorption.

Nanovea's standard inspection system stage speed can reach 1m/s. It is equipped with a 31kHz white light axial chromatism sensor and XY measurement area of 400 x 600mm, which at maximum stage speed can measure 1 point every 32µm and traverse the full 400mm in less than 1 second, (higher resolution can be obtained with proportionally slower stage speeds).

In addition, the system allows Nanovea PRVision (auto-recognition) on precisely chosen surface features with little to no user interaction through user-friendly software. These features can then be automatically measured or the user can select from a list from which to measure.

The online inspection feature allows automatic product ID scan with a bar code reader; the product ID is then checked against predefined pass/fail and measurement requirements stored on a company database.

Measurement speeds range from 1m/s and 31,000 points/sec with nanometre accuracies. There are various scan types, analysis functions and size options that can be customised to fit applications throughout all industries.

To reach speeds suitable for more time constraint production and quality control environments a line sensor can be used providing 1 x 180 array of measurement points and can scan up to 1,800 lines per second to create and overall scan rate of up to 324,000 points per second.

Nanovea's HS100 system is the instrument of choice for inspection demands found in semiconductor, microelectronics, solar and medical industries, among many others. Inspection capability can be provided for stand alone or inline integration.


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