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Mic401ET microscope

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Omek Optics of Israel, a supplier of high-end industrial microscopes, has teamed up with Allied Vision Technologies to provide systems for industrial inspection of microelectronics components.

Omek microscopes deliver high-resolution images at low magnification, yielding ultra wide fields of view. For example, the Mic401ET microscope features a high-resolution short focal length tube lens that supports digital cameras with up to 1-inch sensor format.

At Optatec, the trade fair for optical technologies (22-25 May), Omek Optics showcased two setups of their 300 and 400 series microscopes for semiconductor wafer inspection.

An Omek Mic401ET microscope fitted with an AVT Manta G-504 CCD camera demonstrated the combination of low magnification microscopy with a high-resolution camera. The demo setup showed a CCD wafer inspected at 2x or 4x magnifications with a 5 Megapixel camera. The Manta G-504 features a 2/3-inch ICX655 CCD sensor from Sony with 2,452 x 2,056 pixel resolution. Thanks to the high-resolution tube lens of the Omek microscope (80mm focal length), the full resolution of the sensor can be used, delivering high-resolution images.

Omek Optics also showcased on their booth an Omek Mic303 microscope combined with an AVT Goldeye P-032 shortwave infrared camera used to inspect the same CCD wafer. Using infrared imaging makes it possible to see through the silicon and inspect metallic components located on the back side of the chip.